Inventor · disambiguated record
Jeffrey Womack
Also filed as: WOMACK JEFFREY · WOMACK JEFFREY D
9 granted patents·2 pending applications·123 citations·filing 1999–2024
87Inventor score
Top patents by PatentIndex Score
11 records- 0184US10472716B1Showerhead with air-gapped plenums and overhead isolation gas distributorLAM RES CORP·Filed 2018·Granted Nov 12, 2019·4 cites·20 claims
- 0284US10332778B2Lift pin assembly and associated methodsLAM RES CORP·Filed 2015·Granted Jun 25, 2019·6 cites·23 claims
- 0384US6307184B1Thermal processing chamber for heating and cooling wafer-like objectsFSI INT INC·Filed 1999·Granted Oct 23, 2001·71 cites·29 claims
- 0481US6423947B2Thermal processing chamber for heating and cooling wafer-like objectsFSI INT INC·Filed 2001·Granted Jul 23, 2002·27 cites·6 claims
- 0573US8925588B2Flow balancing in gas distribution networksNOVELLUS SYSTEMS INC·Filed 2012·Granted Jan 6, 2015·3 cites·27 claims
- 0667US9268340B2Flow balancing in gas distribution networksNOVELLUS SYSTEMS INC·Filed 2014·Granted Feb 23, 2016·2 cites·35 claims
- 0766US6838115B2Thermal processing system and methods for forming low-k dielectric films suitable for incorporation into microelectronic devicesFSI INT INC·Filed 2001·Granted Jan 4, 2005·10 cites·39 claims
- 0857US10745806B2Showerhead with air-gapped plenums and overhead isolation gas distributorLAM RES CORP·Filed 2019·Granted Aug 18, 2020·0 cites·20 claims
- 0946US2023052089A1In situ surface coating of process chamberLAM RES CORP·Filed 2021·Application pending·0 cites
- 1041USD1105018SShower headLAM RES CORP·Filed 2024·Granted Dec 9, 2025·0 cites·1 claims
- 1139US2004047993A1Thermal processing system and methods for forming low-k dielectric films suitable for incorporation into microelectronic devicesFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →