Inventor · disambiguated record

Chang-Lian Yan

Also filed as: YAN CHANG-LIAN

1 granted patent·21 citations·filing 2002–2002

41Inventor score

Technology areasH10P

Files withAPPLIED MATERIALS INC1

Top patents by PatentIndex Score

1 record

0176US6884464B2Methods for forming silicon comprising films using hexachlorodisilane in a single-wafer deposion chamberAPPLIED MATERIALS INC·Filed 2002·Granted Apr 26, 2005·21 cites·20 claims

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