Inventor · disambiguated record

Yutaka Yatsu

Also filed as: YATSU YUTAKA

2 granted patents·90 citations·filing 1998–1998

67Inventor score

Technology areasC23C

Files withSHIBAURA MECHATRONICS CORP2

Top patents by PatentIndex Score

2 records

0183US6416638B1Power supply unit for sputtering deviceSHIBAURA MECHATRONICS CORP·Filed 1998·Granted Jul 9, 2002·67 cites·23 claims
0255US6113760APower supply apparatus for sputtering and a sputtering apparatus using the power supply apparatusSHIBAURA MECHATRONICS CORP·Filed 1998·Granted Sep 5, 2000·23 cites·20 claims

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