Inventor · disambiguated record
Shigehiro Ushikubo
Also filed as: USHIKUBO SHIGEHIRO
5 granted patents·3 pending applications·44 citations·filing 2009–2012
78Inventor score
Top patents by PatentIndex Score
8 records- 0193US9053909B2Activated gas injector, film deposition apparatus, and film deposition methodKATO HITOSHI·Filed 2009·Granted Jun 9, 2015·20 cites·3 claims
- 0291US9932674B2Film deposition apparatus, film deposition method, and computer-readable recording mediumKATO HITOSHI·Filed 2012·Granted Apr 3, 2018·14 cites·20 claims
- 0387US9453280B2Film deposition apparatus, film deposition method and storage mediumKATO HITOSHI·Filed 2012·Granted Sep 27, 2016·4 cites·5 claims
- 0478US8642487B2Film deposition method and film deposition apparatusKATO HITOSHI·Filed 2012·Granted Feb 4, 2014·4 cites·8 claims
- 0568US9062373B2Film deposition apparatusKATO HITOSHI·Filed 2012·Granted Jun 23, 2015·2 cites·13 claims
- 0646US2011039026A1Film deposition apparatus, film deposition method, and computer readable storage mediumTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
- 0739US2013047923A1Film deposition apparatus, substrate processing apparatus, and plasma generating deviceKATO HITOSHI·Filed 2012·Application pending·0 cites
- 0837US2011155057A1Plasma process apparatusTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →