Inventor · disambiguated record
Ralf Otterbach
Also filed as: OTTERBACH RALF
4 granted patents·1 pending application·13 citations·filing 2008–2011
63Inventor score
Top patents by PatentIndex Score
5 records- 0188US7981740B2Enhanced cap layer integrity in a high-K metal gate stack by using a hard mask for offset spacer patterningGLOBALFOUNDRIES INC·Filed 2010·Granted Jul 19, 2011·13 cites·21 claims
- 0247US7977179B2Dopant profile tuning for MOS devices by adapting a spacer width prior to implantationGLOBALFOUNDRIES INC·Filed 2008·Granted Jul 12, 2011·0 cites·7 claims
- 0342US8507351B2Dopant profile tuning for MOS devices by adapting a spacer width prior to implantationMOWRY ANTHONY·Filed 2011·Granted Aug 13, 2013·0 cites·17 claims
- 0435US2013037866A1Method of forming a semiconductor deviceGLOBALFOUNDRIES INC·Filed 2011·Application pending·0 cites
- 0534US8987103B2Multi-step deposition of a spacer material for reducing void formation in a dielectric material of a contact level of a semiconductor deviceLENSKI MARKUS·Filed 2010·Granted Mar 24, 2015·0 cites·21 claims
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