Inventor · disambiguated record
Krupakar M. Subramanian
Also filed as: SUBRAMANIAN KRUPAKAR M · SUBRAMANIAN KRUPAKAR MURALI
24 granted patents·9 pending applications·215 citations·filing 2005–2016
95Inventor score
Files withMICRON TECHNOLOGY INC19SUBRAMANIAN KRUPAKAR M10SUBRAMANIAN KRUPAKAR MURALI3ABATCHEV MIRZAFER1
Top patents by PatentIndex Score
33 records- 0197US9679781B2Methods for integrated circuit fabrication with protective coating for planarizationMICRON TECHNOLOGY INC·Filed 2015·Granted Jun 13, 2017·27 cites·10 claims
- 0297US7393789B2Protective coating for planarizationMICRON TECHNOLOGY INC·Filed 2005·Granted Jul 1, 2008·110 cites·39 claims
- 0392US9003651B2Methods for integrated circuit fabrication with protective coating for planarizationMICRON TECHNOLOGY INC·Filed 2013·Granted Apr 14, 2015·9 cites·20 claims
- 0490US7662718B2Trim process for critical dimension control for integrated circuitsMICRON TECHNOLOGY INC·Filed 2006·Granted Feb 16, 2010·14 cites·23 claims
- 0590US7662299B2Nanoimprint lithography template techniques for use during the fabrication of a semiconductor device and systems including sameMICRON TECHNOLOGY INC·Filed 2005·Granted Feb 16, 2010·9 cites·6 claims
- 0688US7511356B2Voltage-controlled semiconductor inductor and methodMICRON TECHNOLOGY INC·Filed 2005·Granted Mar 31, 2009·12 cites·20 claims
- 0788US7459363B2Line edge roughness reductionMICRON TECHNOLOGY INC·Filed 2006·Granted Dec 2, 2008·13 cites·20 claims
- 0887US8479384B2Methods for integrated circuit fabrication with protective coating for planarizationABATCHEV MIRZAFER·Filed 2011·Granted Jul 9, 2013·6 cites·20 claims
- 0975US8183138B2Methods for forming nanodots and/or a patterned material during the formation of a semiconductor deviceSUBRAMANIAN KRUPAKAR M·Filed 2010·Granted May 22, 2012·2 cites·13 claims
- 1075US7517558B2Methods for positioning carbon nanotubesMICRON TECHNOLOGY INC·Filed 2005·Granted Apr 14, 2009·3 cites·3 claims
- 1174US9061297B2Device for controlling placement of nanoparticlesMICRON TECHNOLOGY INC·Filed 2014·Granted Jun 23, 2015·2 cites·10 claims
- 1272US8011090B2Method for forming and planarizing adjacent regions of an integrated circuitMICRON TECHNOLOGY INC·Filed 2008·Granted Sep 6, 2011·2 cites·16 claims
- 1370US7704849B2Methods of forming trench isolation in silicon of a semiconductor substrate by plasmaMICRON TECHNOLOGY INC·Filed 2007·Granted Apr 27, 2010·2 cites·20 claims
- 1468US8802573B2Methods of etching trenches into silicon of a semiconductor substrate, methods of forming trench isolation in silicon of a semiconductor substrate, and methods of forming a plurality of diodesSUBRAMANIAN KRUPAKAR M·Filed 2012·Granted Aug 12, 2014·1 cites·6 claims
- 1567US7883927B2Method and apparatus to sort nanotubesMICRON TECHNOLOGY INC·Filed 2005·Granted Feb 8, 2011·1 cites·25 claims
- 1664US7291563B2Method of etching a substrate; method of forming a feature on a substrate; and method of depositing a layer comprising silicon, carbon, and fluorine onto a semiconductor substrateMICRON TECHNOLOGY INC·Filed 2005·Granted Nov 6, 2007·1 cites·73 claims
- 1763US7410903B2Methods of patterning substratesMICRON TECHNOLOGY INC·Filed 2005·Granted Aug 12, 2008·1 cites·22 claims
- 1860US9610593B2Device for positioning nanoparticlesMICRON TECHNOLOGY INC·Filed 2015·Granted Apr 4, 2017·0 cites·20 claims
- 1960US9524875B2Methods of etching trenches into silicon of a semiconductor substrateMICRON TECHNOLOGY INC·Filed 2014·Granted Dec 20, 2016·0 cites·17 claims
- 2056US2012244244A1Nanoimprint lithography templatesSUBRAMANIAN KRUPAKAR M·Filed 2012·Application pending·0 cites
- 2154US7944019B2Voltage-controlled semiconductor inductor and methodMICRON TECHNOLOGY INC·Filed 2009·Granted May 17, 2011·0 cites·25 claims
- 2253US8747557B2Devices for positioning carbon nanoparticles, and systems for controlling placement of nanoparticlesSUBRAMANIAN KRUPAKAR MURALI·Filed 2009·Granted Jun 10, 2014·0 cites·7 claims
- 2353US7473645B2Method of depositing a layer comprising silicon, carbon, and fluorine onto a semiconductor substrateMICRON TECHNOLOGY INC·Filed 2006·Granted Jan 6, 2009·0 cites·28 claims
- 2452US2008286969A1Patterning methodsSUBRAMANIAN KRUPAKAR M·Filed 2008·Application pending·0 cites
- 2550US8252658B2Methods of etching trenches into silicon of a semiconductor substrate, methods of forming trench isolation in silicon of a semiconductor substrate, and methods of forming a plurality of diodesSUBRAMANIAN KRUPAKAR M·Filed 2010·Granted Aug 28, 2012·0 cites·7 claims
- 2649US8569863B2Voltage-controlled semiconductor inductor and methodSUBRAMANIAN KRUPAKAR M·Filed 2011·Granted Oct 29, 2013·0 cites·20 claims
- 2749US2011123726A1Nanostructure sortingSUBRAMANIAN KRUPAKAR M·Filed 2011·Application pending·0 cites
- 2845US2007181529A1Corona discharge plasma source devices, and various systems and methods of using sameSUBRAMANIAN KRUPAKAR M·Filed 2006·Application pending·0 cites
- 2944US2006060796A1Method and apparatus for plasma source ion implantation in metals and non-metalsSUBRAMANIAN KRUPAKAR M·Filed 2005·Application pending·0 cites
- 3042US2007123050A1Etch process used during the manufacture of a semiconductor device and systems including the semiconductor deviceMICRON TECHNOLOGY INC·Filed 2005·Application pending·0 cites
- 3139US2006049116A1Method and apparatus for bubble glow discharge plasma treatment of fluidsSUBRAMANIAN KRUPAKAR M·Filed 2005·Application pending·0 cites
- 3237US2015318149A1Systems and methods for generating high pressure dischargeSUBRAMANIAN KRUPAKAR MURALI·Filed 2013·Application pending·0 cites
- 3334US2018291605A1Odor trap mechanisms and self cleaning urinal systemsSUBRAMANIAN KRUPAKAR MURALI·Filed 2016·Application pending·0 cites
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