Inventor · disambiguated record
Yang-Kai Fan
Also filed as: FAN YANG-KAI
3 granted patents·2 pending applications·7 citations·filing 2002–2013
59Inventor score
Top patents by PatentIndex Score
5 records- 0155US8460478B2Wet processing apparatusesTANG KUANG-NIAN·Filed 2007·Granted Jun 11, 2013·2 cites·14 claims
- 0246US8871032B2Wet processing apparatusesTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Oct 28, 2014·0 cites·18 claims
- 0343US7405165B2Dual-tank etch method for oxide thickness controlTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Jul 29, 2008·5 cites·17 claims
- 0440US2010279438A1Apparatus and method of in-situ identification for contamination control in semiconductor fabricationTAIWAN SEMICONDUCTOR MFG·Filed 2009·Application pending·0 cites
- 0527US2004000375A1Plasma etch chamber equipped with multi-layer insert ringTAIWAN SEMICONDUCTOR MFG·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →