Inventor · disambiguated record
Eiichi Seya
Also filed as: SEYA EIICHI
12 granted patents·2 pending applications·415 citations·filing 1991–2011
93Inventor score
Top patents by PatentIndex Score
14 records- 0199US6664552B2Method and apparatus for specimen fabricationHITACHI LTD·Filed 2001·Granted Dec 16, 2003·139 cites·2 claims
- 0294US7897936B2Method and apparatus for specimen fabricationHITACHI LTD·Filed 2007·Granted Mar 1, 2011·15 cites·15 claims
- 0392US6794663B2Method and apparatus for specimen fabricationHITACHI LTD·Filed 2003·Granted Sep 21, 2004·33 cites·9 claims
- 0490US7268356B2Method and apparatus for specimen fabricationHITACHI LTD·Filed 2004·Granted Sep 11, 2007·28 cites·13 claims
- 0587US5420436AMethods for measuring optical system, and method and apparatus for exposure using said measuring methodHITACHI LTD·Filed 1993·Granted May 30, 1995·61 cites·14 claims
- 0684US7791043B2Stage mechanism, electron microscope having the stage mechanism and method of controlling positioning of stage mechanismHITACHI HIGH TECH CORP·Filed 2008·Granted Sep 7, 2010·11 cites·12 claims
- 0782US5562800AWafer transport methodHITACHI LTD·Filed 1994·Granted Oct 8, 1996·69 cites·21 claims
- 0878US5235591AStack type optical disc apparatus, sealed and separate type optical head therefor and optical disc mediumHITACHI LTD·Filed 1991·Granted Aug 10, 1993·27 cites·34 claims
- 0977US8796651B2Method and apparatus for specimen fabricationSHICHI HIROYASU·Filed 2011·Granted Aug 5, 2014·2 cites·12 claims
- 1065US5601686AWafer transport methodHITACHI LTD·Filed 1996·Granted Feb 11, 1997·26 cites·22 claims
- 1163US7514683B2Scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2007·Granted Apr 7, 2009·1 cites·3 claims
- 1252US6943945B2Two axis state for microscopeHITACHI HIGH TECH CORP·Filed 2004·Granted Sep 13, 2005·3 cites·7 claims
- 1348US2009236540A1Stage and electron microscope apparatusHITACHI HIGH TECH CORP·Filed 2009·Application pending·0 cites
- 1446US2008217534A1Scanning Electron MicroscopeHITACHI HIGH TECH CORP·Filed 2008·Application pending·0 cites
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