Inventor · disambiguated record
Paul A. Zimmerman
Also filed as: ZIMMERMAN PAUL · ZIMMERMAN PAUL A · ZIMMERMAN PAUL ALLEN
18 granted patents·3 pending applications·611 citations·filing 1995–2016
93Inventor score
Top patents by PatentIndex Score
21 records- 0197US7579285B2Atomic layer deposition method for depositing a layerIMEC·Filed 2006·Granted Aug 25, 2009·464 cites·37 claims
- 0290US9932671B2Precursor and process design for photo-assisted metal atomic layer deposition (ALD) and chemical vapor deposition (CVD)INTEL CORP·Filed 2014·Granted Apr 3, 2018·10 cites·8 claims
- 0390US8764905B1Cleaning organic residues from EUV optics and masksZIMMERMAN PAUL A·Filed 2013·Granted Jul 1, 2014·10 cites·17 claims
- 0489US6790796B2Nonwovens forming or conveying fabrics with enhanced surface roughness and textureALBANY INT CORP·Filed 2001·Granted Sep 14, 2004·38 cites·28 claims
- 0584US8319295B2Use of F-based gate etch to passivate the high-k/metal gate stack for deep submicron transistor technologiesCOLLAERT NADINE·Filed 2008·Granted Nov 27, 2012·25 cites·37 claims
- 0682US9786559B2Process and material for preventing deleterious expansion of high aspect ratio copper filled through silicon vias (TSVs)INTEL CORP·Filed 2016·Granted Oct 10, 2017·3 cites·12 claims
- 0781US8124230B2Non-aggregating nanoparticles and the use thereofZIMMERMAN PAUL A·Filed 2009·Granted Feb 28, 2012·8 cites·26 claims
- 0872US7264853B2Attaching a pellicle frame to a reticleINTEL CORP·Filed 2003·Granted Sep 4, 2007·16 cites·17 claims
- 0965US5629210ARapid screening test for smith-lemli-opitz syndromeUNIV PITTSBURGH·Filed 1995·Granted May 13, 1997·30 cites·9 claims
- 1062US8012651B2Mounting a pellicle to a frameINTEL CORP·Filed 2007·Granted Sep 6, 2011·2 cites·16 claims
- 1157US7316869B2Mounting a pellicle to a frameINTEL CORP·Filed 2003·Granted Jan 8, 2008·5 cites·23 claims
- 1252US7732120B2Method for making soft pelliclesSEMATECH INC·Filed 2008·Granted Jun 8, 2010·0 cites·22 claims
- 1349US7709180B2Soft pellicle and method of making sameSEMATECH INC·Filed 2008·Granted May 4, 2010·0 cites·18 claims
- 1446US2014117559A1Process and material for preventing deleterious expansion of high aspect ratio copper filled through silicon vias (tsvs)ZIMMERMAN PAUL A·Filed 2012·Application pending·0 cites
- 1545US8134684B2Immersion lithography using hafnium-based nanoparticlesZIMMERMAN PAUL A·Filed 2008·Granted Mar 13, 2012·0 cites·15 claims
- 1643US10998405B2Low-defect graphene-based devices and interconnectsINTEL CORP·Filed 2015·Granted May 4, 2021·0 cites·18 claims
- 1743US8551675B2Mounting a pellicle to a frameESCHBACH FLORENCE·Filed 2011·Granted Oct 8, 2013·0 cites·5 claims
- 1843US2015380615A1Light emitting diodes with improved efficiencyZIMMERMAN PAUL A·Filed 2014·Application pending·0 cites
- 1942US8211812B2Method for fabricating a high-K dielectric layerRAGNARSSON LARS-AKE·Filed 2008·Granted Jul 3, 2012·0 cites·15 claims
- 2039US2012132516A1Synthesis of Graphene Films CycloalkanesZIMMERMAN PAUL A·Filed 2010·Application pending·0 cites
- 2138US7504192B2Soft pellicle for 157 and 193 nm and method of making sameSEMATECH INC·Filed 2004·Granted Mar 17, 2009·0 cites·4 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →