Inventor · disambiguated record
Yoon Ki Sa
Also filed as: SA YOON KI
2 granted patents·2 pending applications·1 citations·filing 2017–2022
30Inventor score
Files withSEMES CO LTD4
Top patents by PatentIndex Score
4 records- 0178US11495467B2Method and apparatus for etching thin layerSEMES CO LTD·Filed 2020·Granted Nov 8, 2022·1 cites·20 claims
- 0249US2023338993A1Apparatus for heating chemical liquid and system for treating substrate including the sameSEMES CO LTD·Filed 2022·Application pending·0 cites
- 0341US2021134617A1Substrate treatment apparatusSEMES CO LTD·Filed 2020·Application pending·0 cites
- 0428US10777458B2Method of filling a via hole and apparatus for performing the sameSEMES CO LTD·Filed 2017·Granted Sep 15, 2020·0 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →