Inventor · disambiguated record
Liliya Krivulina
Also filed as: KRIVULINA LILIYA · KRIVULINA LILIYA I
6 granted patents·3 pending applications·12 citations·filing 2011–2024
77Inventor score
Top patents by PatentIndex Score
9 records- 0188US11031262B2Loadlock integrated bevel etcher systemAPPLIED MATERIALS INC·Filed 2020·Granted Jun 8, 2021·2 cites·20 claims
- 0282US8309421B2Dual-bulb lamphead control methodologyYANG YAO-HUNG·Filed 2011·Granted Nov 13, 2012·5 cites·17 claims
- 0374US10636684B2Loadlock integrated bevel etcher systemAPPLIED MATERIALS INC·Filed 2019·Granted Apr 28, 2020·1 cites·20 claims
- 0469US10403515B2Loadlock integrated bevel etcher systemAPPLIED MATERIALS INC·Filed 2016·Granted Sep 3, 2019·1 cites·13 claims
- 0568US8841629B2Microwave excursion detection for semiconductor processingHENDRICKSON SCOTT A·Filed 2012·Granted Sep 23, 2014·3 cites·17 claims
- 0665US12473637B2Interlock system for processing chamber exhaust assemblyAPPLIED MATERIALS INC·Filed 2022·Granted Nov 18, 2025·0 cites·9 claims
- 0759US2025285902A1Arc current reduction from an electrostatic chuckAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0858US2025308968A1Arc reduction using unreferenced floating power suppliesAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0948US2013122611A1Dual-bulb lamphead control methodologyYANG YAO-HUNG·Filed 2012·Application pending·0 cites
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