Inventor · disambiguated record
Tomoyuki Akashi
Also filed as: AKASHI TOMOYUKI
3 granted patents·1 pending application·210 citations·filing 2000–2007
77Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0195US6861614B1S system for the formation of a silicon thin film and a semiconductor-insulating film interfaceNEC CORP·Filed 2000·Granted Mar 1, 2005·156 cites·11 claims
- 0286US7312418B2Semiconductor thin film forming systemNEC CORP·Filed 2004·Granted Dec 25, 2007·32 cites·9 claims
- 0376US6680460B1Apparatus for producing a semiconductor thin filmNEC CORP·Filed 2000·Granted Jan 20, 2004·22 cites·20 claims
- 0450US2007166945A1Semiconductor thin film forming systemTANABE HIROSHI·Filed 2007·Application pending·0 cites
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