Inventor · disambiguated record

Leonhard Mader

Also filed as: MADER LEONHARD

2 granted patents·27 citations·filing 1991–1993

62Inventor score

Technology areasG03F

Files withSIEMENS AG2

Top patents by PatentIndex Score

2 records

0164US5397664APhase mask for projection lithography and method for the manufacture thereofSIEMENS AG·Filed 1993·Granted Mar 14, 1995·18 cites·11 claims
0247US5284724APhase mask for projection lithography and method for the manufacture thereof comprising a selectively etchable phase shift layer directly on substrateSIEMENS AG·Filed 1991·Granted Feb 8, 1994·9 cites·6 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →