Inventor · disambiguated record
Alexander J. Pasadyn
Also filed as: PASADYN ALEXANDER J · PASADYN ALEXANDER JAMES
62 granted patents·2 pending applications·2,483 citations·filing 2000–2005
99Inventor score
Files withADVANCED MICRO DEVICES INC56GLOBALFOUNDRIES INC2ADVANCED MIRCO DEVICES INC1ADVANCES MICRO DEVICES INC1SONDERMAN THOMAS J1
Top patents by PatentIndex Score
64 records- 0199US6746308B1Dynamic lot allocation based upon wafer state characteristics, and system for accomplishing sameADVANCED MICRO DEVICES INC·Filed 2001·Granted Jun 8, 2004·410 cites·10 claims
- 0298US6988017B2Adaptive sampling method for improved control in semiconductor manufacturingADVANCED MICRO DEVICES INC·Filed 2005·Granted Jan 17, 2006·122 cites·66 claims
- 0397US6757579B1Kalman filter state estimation for a manufacturing systemADVANCED MICRO DEVICES INC·Filed 2002·Granted Jun 29, 2004·141 cites·37 claims
- 0497US6540591B1Method and apparatus for post-polish thickness and uniformity controlFiled 2001·Granted Apr 1, 2003·100 cites·40 claims
- 0597US6442496B1Method and apparatus for dynamic sampling of a production lineADVANCED MICRO DEVICES INC·Filed 2000·Granted Aug 27, 2002·140 cites·38 claims
- 0696US6738682B1Method and apparatus for scheduling based on state estimation uncertaintiesADVANCES MICRO DEVICES INC·Filed 2002·Granted May 18, 2004·169 cites·36 claims
- 0796US6708075B2Method and apparatus for utilizing integrated metrology data as feed-forward dataADVANCED MICRO DEVICES INC·Filed 2001·Granted Mar 16, 2004·103 cites·22 claims
- 0895US6751518B1Dynamic process state adjustment of a processing tool to reduce non-uniformityADVANCED MICRO DEVICES INC·Filed 2002·Granted Jun 15, 2004·85 cites·34 claims
- 0994US6917849B1Method and apparatus for predicting electrical parameters using measured and predicted fabrication parametersADVANCED MICRO DEVICES INC·Filed 2002·Granted Jul 12, 2005·75 cites·25 claims
- 1093US6708129B1Method and apparatus for wafer-to-wafer control with partial measurement dataADVANCED MICRO DEVICES INC·Filed 2001·Granted Mar 16, 2004·69 cites·27 claims
- 1193US6678570B1Method and apparatus for determining output characteristics using tool state dataADVANCED MICRO DEVICES INC·Filed 2001·Granted Jan 13, 2004·79 cites·17 claims
- 1289US7067333B1Method and apparatus for implementing competing control modelsADVANCED MICRO DEVICES INC·Filed 2002·Granted Jun 27, 2006·50 cites·23 claims
- 1389US6778873B1Identifying a cause of a fault based on a process controller outputADVANCED MICRO DEVICES INC·Filed 2002·Granted Aug 17, 2004·56 cites·27 claims
- 1488US6947803B1Dispatch and/or disposition of material based upon an expected parameter resultADVANCED MICRO DEVICES INC·Filed 2002·Granted Sep 20, 2005·41 cites·38 claims
- 1588US6650955B1Method and apparatus for determining a sampling plan based on process and equipment fingerprintingADVANCED MICRO DEVICES INC·Filed 2001·Granted Nov 18, 2003·47 cites·37 claims
- 1688US6610550B1Method and apparatus for correlating error model with defect dataADVANCED MICRO DEVICES INC·Filed 2002·Granted Aug 26, 2003·51 cites·9 claims
- 1787US6444481B1Method and apparatus for controlling a plating processADVANCED MICRO DEVICES INC·Filed 2001·Granted Sep 3, 2002·36 cites·27 claims
- 1886US6961636B1Method and apparatus for dynamically monitoring controller tuning parametersADVANCED MICRO DEVICES INC·Filed 2002·Granted Nov 1, 2005·25 cites·38 claims
- 1986US6725121B1Method and apparatus for using a dynamic control model to compensate for a process interruptADVANCED MICRO DEVICES INC·Filed 2001·Granted Apr 20, 2004·24 cites·31 claims
- 2086US6687561B1Method and apparatus for determining a sampling plan based on defectivityADVANCED MICRO DEVICES INC·Filed 2002·Granted Feb 3, 2004·40 cites·35 claims
- 2185US6821792B1Method and apparatus for determining a sampling plan based on process and equipment state informationADVANCED MICRO DEVICES INC·Filed 2001·Granted Nov 23, 2004·32 cites·34 claims
- 2285US6665623B1Method and apparatus for optimizing downstream uniformityADVANCED MICRO DEVICES INC·Filed 2002·Granted Dec 16, 2003·29 cites·17 claims
- 2382US7103439B1Method and apparatus for initializing tool controllers based on tool event dataADVANCED MICRO DEVICES INC·Filed 2001·Granted Sep 5, 2006·19 cites·28 claims
- 2482US6745086B1Method and apparatus for determining control actions incorporating defectivity effectsADVANCED MICRO DEVICES INC·Filed 2002·Granted Jun 1, 2004·25 cites·38 claims
- 2582US6737208B1Method and apparatus for controlling photolithography overlay registration incorporating feedforward overlay informationADVANCED MICRO DEVICES INC·Filed 2001·Granted May 18, 2004·14 cites·18 claims
- 2682US6645780B1Method and apparatus for combining integrated and offline metrology for process controlADVANCED MICRO DEVICES INC·Filed 2001·Granted Nov 11, 2003·27 cites·12 claims
- 2781US6615098B1Method and apparatus for controlling a tool using a baseline control scriptADVANCED MICRO DEVICES INC·Filed 2001·Granted Sep 2, 2003·30 cites·34 claims
- 2880US6937914B1Method and apparatus for controlling process target values based on manufacturing metricsADVANCED MICRO DEVICES INC·Filed 2001·Granted Aug 30, 2005·16 cites·48 claims
- 2980US6605479B1Method of using damaged areas of a wafer for process qualifications and experiments, and system for accomplishing sameADVANCED MICRO DEVICES INC·Filed 2001·Granted Aug 12, 2003·22 cites·27 claims
- 3079US6978189B1Matching data related to multiple metrology toolsADVANCED MICRO DEVICES INC·Filed 2002·Granted Dec 20, 2005·21 cites·34 claims
- 3179US6698009B1Method and apparatus for modeling of batch dynamics based upon integrated metrologyADVANCED MICRO DEVICES INC·Filed 2002·Granted Feb 24, 2004·26 cites·21 claims
- 3279US6534328B1Method of modeling and controlling the endpoint of chemical mechanical polishing operations performed on a process layer, and system for accomplishing sameADVANCED MICRO DEVICES INC·Filed 2001·Granted Mar 18, 2003·22 cites·22 claims
- 3378US6907369B1Method and apparatus for modifying design constraints based on observed performanceADVANCED MICRO DEVICES INC·Filed 2003·Granted Jun 14, 2005·22 cites·29 claims
- 3478US6785586B1Method and apparatus for adaptively scheduling tool maintenanceADVANCED MICRO DEVICES INC·Filed 2001·Granted Aug 31, 2004·23 cites·23 claims
- 3578US6756243B2Method and apparatus for cascade control using integrated metrologyADVANCED MICRO DEVICES INC·Filed 2001·Granted Jun 29, 2004·25 cites·24 claims
- 3678US6732007B1Method and apparatus for implementing dynamic qualification recipesADVANCED MICRO DEVICES INC·Filed 2002·Granted May 4, 2004·19 cites·19 claims
- 3778US6699727B1Method for prioritizing production lots based on grade estimates and output requirementsADVANCED MICRO DEVICES INC·Filed 2001·Granted Mar 2, 2004·21 cites·26 claims
- 3874US6588007B1Use of endpoint system to match individual processing stations within a toolADVANCED MICRO DEVICES INC·Filed 2001·Granted Jul 1, 2003·16 cites·38 claims
- 3972US6576385B2Method of varying stepper exposure dose to compensate for across-wafer variations in photoresist thicknessADVANCED MICRO DEVICES INC·Filed 2001·Granted Jun 10, 2003·11 cites·43 claims
- 4071US8017411B2Dynamic adaptive sampling rate for model predictionGLOBALFOUNDRIES INC·Filed 2002·Granted Sep 13, 2011·17 cites·24 claims
- 4171US6675058B1Method and apparatus for controlling the flow of wafers through a process flowADVANCED MICRO DEVICES INC·Filed 2001·Granted Jan 6, 2004·14 cites·19 claims
- 4270US8615314B1Process control using analysis of an upstream processSONDERMAN THOMAS J·Filed 2004·Granted Dec 24, 2013·11 cites·47 claims
- 4370US6912433B1Determining a next tool state based on fault detection informationADVANCED MIRCO DEVICES INC·Filed 2002·Granted Jun 28, 2005·14 cites·26 claims
- 4470US6823231B1Tuning of a process control based upon layer dependenciesADVANCED MICRO DEVICES INC·Filed 2002·Granted Nov 23, 2004·12 cites·27 claims
- 4569US6801817B1Method and apparatus for integrating multiple process controllersADVANCED MICRO DEVICES INC·Filed 2001·Granted Oct 5, 2004·14 cites·58 claims
- 4669US6788988B1Method and apparatus using integrated metrology data for pre-process and post-process controlADVANCED MICRO DEVICES INC·Filed 2001·Granted Sep 7, 2004·12 cites·34 claims
- 4768US6969672B1Method and apparatus for controlling a thickness of a conductive layer in a semiconductor manufacturing operationADVANCED MICRO DEVICES INC·Filed 2001·Granted Nov 29, 2005·11 cites·13 claims
- 4868US6925347B1Process control based on an estimated process resultADVANCED MICRO DEVICES INC·Filed 2002·Granted Aug 2, 2005·13 cites·29 claims
- 4968US6901340B1Method and apparatus for distinguishing between sources of process variationADVANCED MICRO DEVICES INC·Filed 2001·Granted May 31, 2005·11 cites·29 claims
- 5068US6632692B1Automated method of controlling critical dimensions of features by controlling stepper exposure dose, and system for accomplishing sameADVANCED MICRO DEVICES INC·Filed 2001·Granted Oct 14, 2003·9 cites·11 claims
Showing the top 50 of 64 patent records by PatentIndex Score.
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