Inventor · disambiguated record
Roland Sevilla
Also filed as: SEVILLA ROLAND · SEVILLA ROLAND K
5 granted patents·2 pending applications·467 citations·filing 1998–2007
86Inventor score
Top patents by PatentIndex Score
7 records- 0196US6126532APolishing pads for a semiconductor substrateCABOT CORP·Filed 1998·Granted Oct 3, 2000·193 cites·18 claims
- 0293US6884156B2Multi-layer polishing pad material for CMPCABOT MICROELECTRONICS CORP·Filed 2003·Granted Apr 26, 2005·77 cites·38 claims
- 0391US6062968APolishing pad for a semiconductor substrateCABOT CORP·Filed 1998·Granted May 16, 2000·139 cites·27 claims
- 0488US6840843B2Method for manufacturing a polishing pad having a compressed translucent regionCABOT MICROELECTRONICS CORP·Filed 2002·Granted Jan 11, 2005·37 cites·29 claims
- 0577US6623331B2Polishing disk with end-point detection portCABOT MICROELECTRONICS CORP·Filed 2001·Granted Sep 23, 2003·21 cites·28 claims
- 0643US2008274674A1Stacked polishing pad for high temperature applicationsCABOT MICROELECTRONICS CORP·Filed 2007·Application pending·0 cites
- 0735US2004259479A1Polishing pad for electrochemical-mechanical polishingCABOT MICROELECTRONICS CORP·Filed 2003·Application pending·0 cites
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