Inventor · disambiguated record
Tarou Sugihara
Also filed as: SUGIHARA TAROU
2 granted patents·3 pending applications·5 citations·filing 2003–2011
53Inventor score
Top patents by PatentIndex Score
5 records- 0174US8040489B2Substrate processing method, exposure apparatus, and method for producing device by immersing substrate in second liquid before immersion exposure through first liquidNIKON CORP·Filed 2005·Granted Oct 18, 2011·3 cites·28 claims
- 0269US8941808B2Immersion lithographic apparatus rinsing outer contour of substrate with immersion spaceNAKANO KATSUSHI·Filed 2008·Granted Jan 27, 2015·2 cites·20 claims
- 0350US2012008112A1Substrate processing method, exposure apparatus, and method for producing device by immersing substrate in second liquid before immersion exposure through first liquidNAKANO KATSUSHI·Filed 2011·Application pending·0 cites
- 0442US2007242248A1Substrate processing method, exposure apparatus, and method for producing deviceNIKON CORP·Filed 2007·Application pending·0 cites
- 0534US2004042648A1Image processing method and unit, detecting method and unit, and exposure method and apparatusNIKON CORP·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →