Inventor · disambiguated record
Eiichi Mukai
Also filed as: MUKAI EIICHI
4 granted patents·325 citations·filing 1993–2002
83Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0189US5301700AWashing systemTOKYO ELECTRON LTD·Filed 1993·Granted Apr 12, 1994·132 cites·12 claims
- 0288US6861371B2Substrate processing system and substrate processing methodTOKYO ELECTRON LTD·Filed 2002·Granted Mar 1, 2005·48 cites·22 claims
- 0385US5370142ASubstrate washing deviceTOKYO ELECTRON LTD·Filed 1993·Granted Dec 6, 1994·99 cites·15 claims
- 0466US5503171ASubstrates-washing apparatusTOKYO ELECTRON LTD·Filed 1993·Granted Apr 2, 1996·46 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →