Inventor · disambiguated record
Min-Sub Kang
Also filed as: KANG MIN-SUB
4 granted patents·74 citations·filing 2000–2008
74Inventor score
Files withSAMSUNG ELECTRONICS CO LTD4
Top patents by PatentIndex Score
4 records- 0190US6440760B1Method of measuring etched state of semiconductor wafer using optical impedence measurementSAMSUNG ELECTRONICS CO LTD·Filed 2000·Granted Aug 27, 2002·67 cites·67 claims
- 0263US7468512B2Computer program products for measuring critical dimensions of fine patterns using scanning electron microscope pictures and secondary electron signal profilesSAMSUNG ELECTRONICS CO LTD·Filed 2006·Granted Dec 23, 2008·1 cites·4 claims
- 0362US7091485B2Methods and systems for measuring critical dimensions of fine patterns using scanning electron microscope pictures and secondary electron signal profilesSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Aug 15, 2006·6 cites·8 claims
- 0457US7923684B2Methods, systems and computer program products for measuring critical dimensions of fine patterns using scanning electron microscope pictures and secondary electron signal profilesSAMSUNG ELECTRONICS CO LTD·Filed 2008·Granted Apr 12, 2011·0 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →