Inventor · disambiguated record
Martyn John Coogans
Also filed as: COOGANS MARTYN JOHN
6 granted patents·47 citations·filing 2009–2014
80Inventor score
Files withASML NETHERLANDS BV3DEN BOEF ARIE JEFFREY1VAN DE KERKHOF MARCUS ADRIANUS1VAN DER SCHAAR MAURITS1
Top patents by PatentIndex Score
6 records- 0195US8786825B2Apparatus and method of measuring a property of a substrateVAN DE KERKHOF MARCUS ADRIANUS·Filed 2009·Granted Jul 22, 2014·30 cites·25 claims
- 0292US8908147B2Method and apparatus for determining an overlay errorDEN BOEF ARIE JEFFREY·Filed 2011·Granted Dec 9, 2014·9 cites·20 claims
- 0384US10295913B2Inspection method and apparatus, and corresponding lithographic apparatusASML NETHERLANDS BV·Filed 2012·Granted May 21, 2019·5 cites·16 claims
- 0475US9235141B2Inspection apparatus and method for measuring a property of a substrateVAN DER SCHAAR MAURITS·Filed 2011·Granted Jan 12, 2016·2 cites·15 claims
- 0572US9594311B2Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Mar 14, 2017·1 cites·20 claims
- 0664US9594310B2Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Mar 14, 2017·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →