Inventor · disambiguated record
Takehiro Otsuka
Also filed as: OTSUKA TAKEHIRO
3 granted patents·2 citations·filing 2012–2013
52Inventor score
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0159US9279183B2Film forming apparatus and method of operating the sameTOKYO ELECTRON LTD·Filed 2012·Granted Mar 8, 2016·1 cites·5 claims
- 0258US9378944B2Method and apparatus of forming carbon filmTOKYO ELECTRON LTD·Filed 2013·Granted Jun 28, 2016·1 cites·18 claims
- 0355US8993456B2Film forming apparatus and method of operating the sameTOKYO ELECTRON LTD·Filed 2012·Granted Mar 31, 2015·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →