Inventor · disambiguated record
Tzu-Yang Chung
Also filed as: CHUNG TZU-YANG
5 granted patents·29 citations·filing 1999–2013
74Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0177US9478444B2Mechanisms for cleaning wafer and scrubberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Oct 25, 2016·6 cites·20 claims
- 0262US9997384B2Methods for transporting wafers between wafer holders and chambersKU SHAO YEN·Filed 2011·Granted Jun 12, 2018·2 cites·20 claims
- 0356US10510527B2Single wafer cleaning tool with H2SO4 recyclingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Dec 17, 2019·1 cites·20 claims
- 0454US6360756B1Wafer rinse tank for metal etching and method for usingTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Mar 26, 2002·20 cites·7 claims
- 0537US9781994B2Wafer cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2012·Granted Oct 10, 2017·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →