Inventor · disambiguated record
Chien-Wen Hsiao
Also filed as: HSIAO CHIEN-WEN
4 granted patents·1 citations·filing 2013–2019
57Inventor score
Technology areasH10P
Files withTAIWAN SEMICONDUCTOR MFG CO LTD4
Top patents by PatentIndex Score
4 records- 0159US11090696B2Apparatus and method of removing photoresist layerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Aug 17, 2021·0 cites·20 claims
- 0256US10510527B2Single wafer cleaning tool with H2SO4 recyclingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Dec 17, 2019·1 cites·20 claims
- 0354US10486204B2Semiconductor apparatus and method of removing photoresist layer on substrateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Nov 26, 2019·0 cites·21 claims
- 0438US9349617B2Mechanisms for wafer cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted May 24, 2016·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →