Inventor · disambiguated record
Ronald D. Fiege
Also filed as: FIEGE RONALD D
6 granted patents·1 pending application·56 citations·filing 1999–2008
77Inventor score
Top patents by PatentIndex Score
7 records- 0177US6325696B1Piezo-actuated CMP carrierIBM·Filed 1999·Granted Dec 4, 2001·50 cites·14 claims
- 0263US7542136B2Flipping stage arrangement for reduced wafer contamination cross section and improved measurement accuracy and throughputIBM·Filed 2007·Granted Jun 2, 2009·1 cites·3 claims
- 0362US7742160B2Determining angle of incidence with respect to workpieceIBM·Filed 2008·Granted Jun 22, 2010·4 cites·20 claims
- 0456US8411270B2Monitoring stage alignment and related stage and calibration targetZANGOOIE SHAHIN·Filed 2008·Granted Apr 2, 2013·1 cites·19 claims
- 0553US7477365B2Optical spot geometric parameter determination using calibration targetsIBM·Filed 2007·Granted Jan 13, 2009·0 cites·7 claims
- 0650US2009027660A1Optical spot geometric parameter determination using calibration targetsZANGOOIE SHAHIN·Filed 2008·Application pending·0 cites
- 0740US7646491B2Determining azimuth angle of incident beam to waferIBM·Filed 2007·Granted Jan 12, 2010·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →