Inventor · disambiguated record
Ya-An Peng
Also filed as: PENG YA-AN
3 granted patents·1 pending application·2 citations·filing 2021–2024
54Inventor score
Technology areasG03F
Files withTAIWAN SEMICONDUCTOR MFG CO LTD4
Top patents by PatentIndex Score
4 records- 0194US11747741B2Substrate stage, substrate processing system using the same, and method for processing substrateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Sep 5, 2023·2 cites·20 claims
- 0284US12111582B2Substrate stage and substrate processing system using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Oct 8, 2024·0 cites·20 claims
- 0384US2024377762A1Semiconductor substrate stage for carring substrateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0460US11556065B2Wafer stage and method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jan 17, 2023·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →