Inventor · disambiguated record
Tomoyasu Miyashita
Also filed as: MIYASHITA TOMOYASU
4 granted patents·1 pending application·21 citations·filing 2005–2019
70Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0186US10998205B2Substrate processing apparatus and manufacturing method of semiconductor deviceKOKUSAI ELECTRIC CORP·Filed 2019·Granted May 4, 2021·5 cites·14 claims
- 0280US8453600B2Substrate processing apparatusMIYASHITA TOMOYASU·Filed 2005·Granted Jun 4, 2013·13 cites·11 claims
- 0377US9394607B2Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2015·Granted Jul 19, 2016·3 cites·15 claims
- 0432US11198935B2Heating part, substrate processing apparatus, and method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2016·Granted Dec 14, 2021·0 cites·24 claims
- 0532US2012052203A1Substrate processing apparatus and method of processing substrateMIYASHITA TOMOYASU·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →