Inventor · disambiguated record
Jiro Kawai
Also filed as: KAWAI JIRO
5 granted patents·17 citations·filing 2013–2015
73Inventor score
Files withSHINKO ELECTRIC IND CO5
Top patents by PatentIndex Score
5 records- 0186US9240340B2Electrostatic chuckSHINKO ELECTRIC IND CO·Filed 2013·Granted Jan 19, 2016·10 cites·11 claims
- 0277US10147628B2Electrostatic chuck and semiconductor-liquid crystal manufacturing apparatusSHINKO ELECTRIC IND CO·Filed 2015·Granted Dec 4, 2018·3 cites·7 claims
- 0368US9252039B2Electrostatic chuck apparatusSHINKO ELECTRIC IND CO·Filed 2014·Granted Feb 2, 2016·2 cites·8 claims
- 0461US9887117B2Electrostatic chuck and semiconductor-liquid crystal manufacturing apparatusSHINKO ELECTRIC IND CO·Filed 2015·Granted Feb 6, 2018·1 cites·6 claims
- 0555US9660557B2Electrostatic chuck and method for manufacturing the electrostatic chuckSHINKO ELECTRIC IND CO·Filed 2013·Granted May 23, 2017·1 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →