Inventor · disambiguated record
Shuichiro Uda
Also filed as: UDA SHUICHIRO
5 granted patents·2 pending applications·10 citations·filing 2009–2021
67Inventor score
Top patents by PatentIndex Score
7 records- 0189US9466468B2Shower head, plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2014·Granted Oct 11, 2016·8 cites·7 claims
- 0259US8716144B2Method for manufacturing semiconductor deviceUDA SHUICHIRO·Filed 2010·Granted May 6, 2014·2 cites·4 claims
- 0345US2009221148A1Plasma etching method, plasma etching apparatus and computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 0444US11443952B2Etching method and etching deviceTOKYO ELECTRON LTD·Filed 2018·Granted Sep 13, 2022·0 cites·19 claims
- 0543US10910229B2Substrate treatment methodTOKYO ELECTRON LTD·Filed 2016·Granted Feb 2, 2021·0 cites·6 claims
- 0643US2021384038A1Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0731US9048191B2Plasma etching methodUDA SHUICHIRO·Filed 2012·Granted Jun 2, 2015·0 cites·5 claims
Join the waitlist — get patent alerts
Get an alert when Shuichiro Uda files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →