Inventor · disambiguated record
Naoya Kida
Also filed as: KIDA NAOYA
5 granted patents·5 pending applications·531 citations·filing 2006–2024
77Inventor score
Top patents by PatentIndex Score
10 records- 0196US7503980B2Substrate supporting apparatusNHK SPRING CO LTD·Filed 2006·Granted Mar 17, 2009·527 cites·3 claims
- 0289US12000737B2Temperature sensor and heater unitNHK SPRING CO LTD·Filed 2022·Granted Jun 4, 2024·2 cites·12 claims
- 0363USRE43837ESubstrate supporting apparatusKIDA NAOYA·Filed 2011·Granted Dec 4, 2012·2 cites·5 claims
- 0459US12424421B2Apparatus and method for controlling a substrate temperatureNHK SPRING CO LTD·Filed 2022·Granted Sep 23, 2025·0 cites·12 claims
- 0559US2025159765A1Sheath heater and stageNHK SPRING CO LTD·Filed 2024·Application pending·0 cites
- 0658US12354901B2Stage and manufacturing method thereofNHK SPRING CO LTD·Filed 2023·Granted Jul 8, 2025·0 cites·22 claims
- 0755US2024032156A1Sheathed heater and substrate support device including the sameNHK SPRING CO LTD·Filed 2023·Application pending·0 cites
- 0855US2024347371A1Laminate structure, stage, semiconductor manufacturing device, and manufacturing method for laminate structureNHK SPRING CO LTD·Filed 2024·Application pending·0 cites
- 0946US2024178049A1Placement board and placement structureNHK SPRING CO LTD·Filed 2022·Application pending·0 cites
- 1046US2022151031A1HeaterNHK SPRING CO LTD·Filed 2022·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Naoya Kida files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →