Inventor · disambiguated record
Johannes Heintze
Also filed as: HEINTZE JOHANNES
4 granted patents·28 citations·filing 2003–2006
71Inventor score
Files withASML NETHERLANDS BV4
Top patents by PatentIndex Score
4 records- 0170US7057705B2Lithographic apparatus, device manufacturing method, performance measuring method, calibration method and computer programASML NETHERLANDS BV·Filed 2003·Granted Jun 6, 2006·18 cites·16 claims
- 0268US7868999B2Lithographic apparatus, source, source controller and control methodASML NETHERLANDS BV·Filed 2006·Granted Jan 11, 2011·3 cites·23 claims
- 0356US7016013B2Modulated lithographic beam to reduce sensitivity to fluctuating scanning speedASML NETHERLANDS BV·Filed 2004·Granted Mar 21, 2006·7 cites·25 claims
- 0439US7297911B2Lithographic apparatus, illumination system, illumination controller and control methodASML NETHERLANDS BV·Filed 2005·Granted Nov 20, 2007·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →