Inventor · disambiguated record
Matthew J. Busche
Also filed as: BUSCHE MATTHEW · BUSCHE MATTHEW J · BUSCHE MATTHEW JAMES
18 granted patents·80 citations·filing 2013–2024
92Inventor score
Top patents by PatentIndex Score
18 records- 0198US10460916B2Real time monitoring with closed loop chucking force controlAPPLIED MATERIALS INC·Filed 2018·Granted Oct 29, 2019·45 cites·11 claims
- 0293US9831111B2Apparatus and method for measurement of the thermal performance of an electrostatic wafer chuckAPPLIED MATERIALS INC·Filed 2014·Granted Nov 28, 2017·13 cites·20 claims
- 0386US12424413B2Substrate support with real time force and film stress controlAPPLIED MATERIALS INC·Filed 2024·Granted Sep 23, 2025·0 cites·17 claims
- 0483US11915913B2Substrate support with real time force and film stress controlAPPLIED MATERIALS INC·Filed 2023·Granted Feb 27, 2024·0 cites·20 claims
- 0582US9558981B2Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methodsAPPLIED MATERIALS INC·Filed 2014·Granted Jan 31, 2017·4 cites·15 claims
- 0681US10879046B2Substrate support with real time force and film stress controlAPPLIED MATERIALS INC·Filed 2015·Granted Dec 29, 2020·2 cites·16 claims
- 0779US9622375B2Electrostatic chuck with external flow adjustments for improved temperature distributionBUSCHE MATTHEW J·Filed 2013·Granted Apr 11, 2017·5 cites·13 claims
- 0876US10403534B2Pixilated cooling, temperature controlled substrate support assemblyAPPLIED MATERIALS INC·Filed 2014·Granted Sep 3, 2019·3 cites·20 claims
- 0976US9520315B2Electrostatic chuck with internal flow adjustments for improved temperature distributionPARKHE VIJAY D·Filed 2013·Granted Dec 13, 2016·3 cites·20 claims
- 1074US11676802B2Substrate support with real time force and film stress controlAPPLIED MATERIALS INC·Filed 2020·Granted Jun 13, 2023·0 cites·11 claims
- 1174US10395964B2Apparatus and method for measurement of the thermal performance of an electrostatic wafer chuckAPPLIED MATERIALS INC·Filed 2017·Granted Aug 27, 2019·1 cites·7 claims
- 1272US10121688B2Electrostatic chuck with external flow adjustments for improved temperature distributionAPPLIED MATERIALS INC·Filed 2017·Granted Nov 6, 2018·1 cites·20 claims
- 1372US9698041B2Substrate temperature control apparatus including optical fiber heating, substrate temperature control systems, electronic device processing systems, and methodsAPPLIED MATERIALS INC·Filed 2014·Granted Jul 4, 2017·2 cites·20 claims
- 1466US10736182B2Apparatus, systems, and methods for temperature control of substrates using embedded fiber optics and epoxy optical diffusersAPPLIED MATERIALS INC·Filed 2015·Granted Aug 4, 2020·1 cites·9 claims
- 1555US9875923B2Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methodsAPPLIED MATERIALS INC·Filed 2016·Granted Jan 23, 2018·0 cites·19 claims
- 1646US10520371B2Optical fiber temperature sensors, temperature monitoring apparatus, and manufacturing methodsAPPLIED MATERIALS INC·Filed 2015·Granted Dec 31, 2019·0 cites·20 claims
- 1742US9986598B2Temperature control apparatus including groove-routed optical fiber heating, substrate temperature control systems, electronic device processing systems, and processing methodsAPPLIED MATERIALS INC·Filed 2015·Granted May 29, 2018·0 cites·20 claims
- 1840US10910238B2Heater pedestal assembly for wide range temperature controlAPPLIED MATERIALS INC·Filed 2017·Granted Feb 2, 2021·0 cites·17 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →