Inventor · disambiguated record
Takeshi Soma
Also filed as: SOMA TAKESHI
4 granted patents·1 pending application·35 citations·filing 2001–2015
72Inventor score
Top patents by PatentIndex Score
5 records- 0190US7359069B2Polishing pad surface shape measuring instrument, method of using polishing pad surface shape measuring instrument, method of measuring apex angle of cone of polishing pad, method of measuring depth of groove of polishing pad, CMP polisher, and method of manufacturing semiconductor deviceNIKON CORP·Filed 2006·Granted Apr 15, 2008·18 cites·12 claims
- 0268US6402440B2Tool assemblyVALENITE INC·Filed 2001·Granted Jun 11, 2002·16 cites·15 claims
- 0362US7486407B2Polishing pad surface shape measuring instrument, method of using polishing pad surface shape measuring instrument, method of measuring apex angle of cone of polishing pad, method of measuring depth of groove of polishing pad, CMP polisher, and method of manufacturing semiconductor deviceNIKON CORP·Filed 2008·Granted Feb 3, 2009·1 cites·10 claims
- 0436US10232153B2Therapeutic instrumentUNIV OSAKA·Filed 2015·Granted Mar 19, 2019·0 cites·8 claims
- 0536US2005221736A1Wafer polishing control system for chemical mechanical planarization machinesNIKON CORP·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →