Inventor · disambiguated record
Yuri Trachuk
Also filed as: TRACHUK YURI
4 granted patents·3 pending applications·120 citations·filing 1994–2013
77Inventor score
Top patents by PatentIndex Score
7 records- 0194US5507930AMethod of sputtering a carbon protective film on a magnetic disk by superimposing an AC voltage on a DC bias voltageKOMAG INC·Filed 1994·Granted Apr 16, 1996·101 cites·16 claims
- 0292US7425716B2Method and apparatus for reducing charge density on a dielectric coated substrate after exposure to a large area electron beamAPPLIED MATERIALS INC·Filed 2006·Granted Sep 16, 2008·14 cites·27 claims
- 0377US7571698B2Low-frequency bias power in HDP-CVD processesAPPLIED MATERIALS INC·Filed 2005·Granted Aug 11, 2009·4 cites·14 claims
- 0462US9673069B2High frequency filter for improved RF bias signal stabilityAPPLIED MATERIALS INC·Filed 2013·Granted Jun 6, 2017·1 cites·14 claims
- 0560US2009263594A1Low-frequency bias power in hdp-cvd processesAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 0647US2006054183A1Method to reduce plasma damage during cleaning of semiconductor wafer processing chamberNOWAK THOMAS·Filed 2005·Application pending·0 cites
- 0745US2005224722A1Method and apparatus for reducing charge density on a dielectric coated substrate after exposure to large area electron beamAPPLIED MATERIALS INC·Filed 2004·Application pending·0 cites
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