Inventor · disambiguated record

Nilay Saha

Also filed as: SAHA NILAY

1 granted patent·0 citations·filing 2009–2009

10Inventor score

Technology areasG03F

Files withASML NETHERLANDS BV1

Top patents by PatentIndex Score

1 record

0141US8345231B2Method of determining defects in a substrate and apparatus for exposing a substrate in a lithographic processASML NETHERLANDS BV·Filed 2009·Granted Jan 1, 2013·0 cites·14 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →