Inventor · disambiguated record
Jeffrey J. Spiegelman
Also filed as: SPIEGELMAN JEFFREY · SPIEGELMAN JEFFREY J
53 granted patents·18 pending applications·1,231 citations·filing 1990–2023
98Inventor score
Top patents by PatentIndex Score
71 records- 0197US11359292B2Suppression of hydrogen degradationRASIRC INC·Filed 2021·Granted Jun 14, 2022·2 cites·20 claims
- 0296US9410191B2Method and system for decontaminating materialsRASIRC INC·Filed 2015·Granted Aug 9, 2016·20 cites·30 claims
- 0395US12057320B2Hydrogen peroxide plasma etch of ashable hard maskRASIRC INC·Filed 2023·Granted Aug 6, 2024·2 cites·20 claims
- 0494US6514313B1Gas purification system and methodAERONEX INC·Filed 2001·Granted Feb 4, 2003·487 cites·23 claims
- 0594US6391090B1Method for purification of lens gases used in photolithographyAERONEX INC·Filed 2001·Granted May 21, 2002·46 cites·25 claims
- 0694US5910292AMethod for water removal from corrosive gas streamsAERONEX INC·Filed 1997·Granted Jun 8, 1999·125 cites·20 claims
- 0791US10363497B2Devices, systems, and methods for controlled delivery of process gasesRASIRC INC·Filed 2017·Granted Jul 30, 2019·8 cites·28 claims
- 0891US7377982B2Method for the removal of airborne molecular contaminants using water gas mixturesENTEGRIS INC·Filed 2005·Granted May 27, 2008·12 cites·24 claims
- 0991US6361696B1Self-regenerative process for contaminant removal from liquid and supercritical CO2 fluid streamsAERONEX INC·Filed 2000·Granted Mar 26, 2002·65 cites·32 claims
- 1090US6524544B1Self-regenerative process for contaminant removal from ammoniaAERONEX INC·Filed 2000·Granted Feb 25, 2003·30 cites·25 claims
- 1189US8282708B2Method of producing high purity steamSPIEGELMAN JEFFREY J·Filed 2006·Granted Oct 9, 2012·23 cites·36 claims
- 1288US9932630B2Method and system for decontaminating materialsRASIRC INC·Filed 2016·Granted Apr 3, 2018·4 cites·21 claims
- 1388US8926731B2Methods and devices for producing high purity steamRASIRC·Filed 2012·Granted Jan 6, 2015·12 cites·23 claims
- 1487US7618027B2Vaporizer for delivery of low vapor pressure gasesRASIRC·Filed 2008·Granted Nov 17, 2009·16 cites·26 claims
- 1586US6089282AMethod for recovery and reuse of gasAERONEX INC·Filed 1998·Granted Jul 18, 2000·76 cites·18 claims
- 1684US9545585B2Method, system, and device for delivery of high purity hydrogen peroxideRASIRC INC·Filed 2013·Granted Jan 17, 2017·6 cites·24 claims
- 1784US8518150B2Method of producing high purity steamSPIEGELMAN JEFFREY J·Filed 2012·Granted Aug 27, 2013·6 cites·51 claims
- 1883US6913654B2Method for the removal of airborne molecular contaminants using water gas mixturesMYKROLIS CORP·Filed 2003·Granted Jul 5, 2005·19 cites·11 claims
- 1981US10196685B2Methods and systems for delivering process gases to critical process applicationsRASIRC INC·Filed 2015·Granted Feb 5, 2019·3 cites·27 claims
- 2080US11634816B2Method, system, and device for storage and delivery of process gas from a substrateRASIRC INC·Filed 2020·Granted Apr 25, 2023·1 cites·26 claims
- 2180US6645898B2Method for purification of lens gases used in photolithographyAERONEX INC·Filed 2002·Granted Nov 11, 2003·13 cites·22 claims
- 2279US10150048B2Method, system, and device for delivery of process gasRASIRC INC·Filed 2017·Granted Dec 11, 2018·1 cites·15 claims
- 2379US7113254B2Lithographic projection apparatus, gas purging method, device manufacturing method, and purge gas supply systemASML NETHERLANDS BV·Filed 2004·Granted Sep 26, 2006·15 cites·18 claims
- 2479US6638341B1Method for rapid activation or preconditioning of porous gas purification substratesAERONEX INC·Filed 2002·Granted Oct 28, 2003·23 cites·23 claims
- 2578US12428735B2Suppression of hydrogen degradationRASIRC INC·Filed 2022·Granted Sep 30, 2025·0 cites·25 claims
- 2678US9610550B2Method of delivering a process gas from a multi-component solutionRASIRC INC·Filed 2013·Granted Apr 4, 2017·4 cites·32 claims
- 2778US5088774ACoupling for interconnection of coaxial tubingTYLAN GENERAL INC·Filed 1990·Granted Feb 18, 1992·50 cites·13 claims
- 2877US7189291B2Method for the removal of airborne molecular contaminants using oxygen gas mixturesENTEGRIS INC·Filed 2003·Granted Mar 13, 2007·15 cites·29 claims
- 2977US6059859AMethod, composition and apparatus for water removal from non-corrosive gas streamsAERONEX INC·Filed 1997·Granted May 9, 2000·47 cites·21 claims
- 3073US10214420B2Method, system, and device for delivery of process gasRASIRC INC·Filed 2015·Granted Feb 26, 2019·1 cites·28 claims
- 3173US6471747B1Method and apparatus for delivering and recovering gassesBRIGHAM & WOMENS HOSPITAL·Filed 2000·Granted Oct 29, 2002·20 cites·15 claims
- 3271US11634815B2Method, system, and device for storage and delivery of process gas from a substrateRASIRC INC·Filed 2020·Granted Apr 25, 2023·0 cites·30 claims
- 3371US7625015B2Fluid connectorRASIRC·Filed 2008·Granted Dec 1, 2009·7 cites·40 claims
- 3470US12460293B2Gas recovery systems and methodsRASIRC INC·Filed 2023·Granted Nov 4, 2025·0 cites·20 claims
- 3570US7879137B2Lithographic projection apparatus, purge gas supply system and gas purging methodENTEGRIS INC·Filed 2004·Granted Feb 1, 2011·7 cites·73 claims
- 3667US6468333B2Gas purifier apparatusAERONEX INC·Filed 2001·Granted Oct 22, 2002·19 cites·28 claims
- 3762US7824628B2Self-regenerative process for contaminant removal from ammoniaENTEGRIS INC·Filed 2002·Granted Nov 2, 2010·4 cites·23 claims
- 3862US2019247791A1Method, system, and device for removing hydrogen peroxide or hydrazine from a process gas streamRASIRC INC·Filed 2019·Application pending·0 cites
- 3960US8664004B2Method for analysis of contaminants in a process fluid streamSPIEGELMAN JEFFREY J·Filed 2004·Granted Mar 4, 2014·4 cites·38 claims
- 4060US2019070521A1Method, system, and device for delivery of process gasRASIRC INC·Filed 2018·Application pending·0 cites
- 4156US7381243B2Method for purifying carbon dioxideENTEGRIS INC·Filed 2003·Granted Jun 3, 2008·5 cites·23 claims
- 4256US6350300B1Gas purification apparatusAERONEX INC·Filed 2001·Granted Feb 26, 2002·6 cites·22 claims
- 4356US2017312687A1Method, system, and device for removing hydrogen peroxide or hydrazine from a process gas streamRASIRC INC·Filed 2017·Application pending·0 cites
- 4455US11635170B2Method, system, and device for storage and delivery of process gas from a substrateRASIRC INC·Filed 2018·Granted Apr 25, 2023·0 cites·33 claims
- 4555US7510692B2Hydride gas purification for the semiconductor industryENTEGRIS INC·Filed 2004·Granted Mar 31, 2009·4 cites·24 claims
- 4653US11458412B2Controlled vapor delivery into low pressure processesRASIRC INC·Filed 2019·Granted Oct 4, 2022·0 cites·26 claims
- 4753US7376489B1Method of identifying fluid purification equipment which is optimized for individual fluid purification systemsENTEGRIS INC·Filed 2000·Granted May 20, 2008·0 cites·28 claims
- 4852US2006243585A1Method for the point of use production of ammonia from water and nitrogenJEFFREY J SPIEGELMAN AND DANIE·Filed 2004·Application pending·0 cites
- 4952US2007137676A1Method for the removal of airborne molecular contaminants using extra clean dry airSPIEGELMAN JEFFREY J·Filed 2007·Application pending·0 cites
- 5051US8075704B2Method for the removal of airborne molecular contaminants using oxygen and/or water gas mixturesSPIEGELMAN JEFFREY J·Filed 2004·Granted Dec 13, 2011·2 cites·26 claims
Showing the top 50 of 71 patent records by PatentIndex Score.
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