Inventor · disambiguated record
Thure Boehm
Also filed as: BOEHM THURE
4 granted patents·2 pending applications·29 citations·filing 2001–2013
72Inventor score
Top patents by PatentIndex Score
6 records- 0173US6667839B2Holding device for an optical element made of a crystalline materialZEISS CARL SMT AG·Filed 2001·Granted Dec 23, 2003·18 cites·19 claims
- 0272US9575224B2Mirror, projection objective with such mirror, and projection exposure apparatus for microlithography with such projection objectiveZEISS CARL SMT GMBH·Filed 2013·Granted Feb 21, 2017·3 cites·22 claims
- 0360US6740159B2Method of making a fracture-resistant calcium fluoride single crystal and its useSCHOTT GLAS·Filed 2002·Granted May 25, 2004·8 cites·14 claims
- 0445US2010033696A1Method and apparatus for producing an element having at least one freeform surface having a high accuracy of form and a low surface roughnessZEISS CARL SMT AG·Filed 2009·Application pending·0 cites
- 0540US2007024982A1Imaging system for a microlithographic projection exposure systemZEISS CARL SMT AG·Filed 2006·Application pending·0 cites
- 0638US8795839B2Repair method for optical elements having a coating and corresponding optical elementsBOEHM THURE·Filed 2009·Granted Aug 5, 2014·0 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →