Inventor · disambiguated record
Maria Johanna Agnes Rubingh
Also filed as: RUBINGH MARIA JOHANNA AGNES
5 granted patents·44 citations·filing 2001–2011
79Inventor score
Top patents by PatentIndex Score
5 records- 0190US7724351B2Lithographic apparatus, device manufacturing method and exchangeable optical elementASML NETHERLANDS BV·Filed 2006·Granted May 25, 2010·12 cites·34 claims
- 0290US7307690B1Device manufacturing method, computer program product and lithographic apparatusASML NETHERLANDS BV·Filed 2006·Granted Dec 11, 2007·13 cites·20 claims
- 0376US7456931B2Device manufacturing method, computer program product and lithographic apparatusASML NETHERLANDS BV·Filed 2007·Granted Nov 25, 2008·4 cites·23 claims
- 0473US6825914B2System for flushing at least one internal space of an objectiveZEISS CARL SMT AG·Filed 2001·Granted Nov 30, 2004·14 cites·24 claims
- 0563US9146477B2Lithographic apparatus and method of modifying a beam of radiation within a lithographic apparatusJANSEN BASTIAAN STEPHANUS HENDRICUS·Filed 2011·Granted Sep 29, 2015·1 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →