Inventor · disambiguated record
Theo Panagopoulos
Also filed as: PANAGOPOULOS THEO
7 granted patents·1 pending application·236 citations·filing 2010–2019
83Inventor score
Top patents by PatentIndex Score
8 records- 0195US9953843B2Chamber for patterning non-volatile metalsLAM RES CORP·Filed 2016·Granted Apr 24, 2018·15 cites·21 claims
- 0294US8133349B1Rapid and uniform gas switching for a plasma etch processPANAGOPOULOS THEO·Filed 2010·Granted Mar 13, 2012·214 cites·8 claims
- 0387US10049862B2Chamber with vertical support stem for symmetric conductance and RF deliveryLAM RES CORP·Filed 2016·Granted Aug 14, 2018·4 cites·25 claims
- 0477US10665435B2Chamber with vertical support stem for symmetric conductance and RF deliveryLAM RES CORP·Filed 2019·Granted May 26, 2020·1 cites·20 claims
- 0575US10395902B2Chamber with vertical support stem for symmetric conductance and RF deliveryLAM RES CORP·Filed 2018·Granted Aug 27, 2019·1 cites·27 claims
- 0661US9011631B2Rapid and uniform gas switching for a plasma etch processPANAGOPOULOS THEO·Filed 2012·Granted Apr 21, 2015·1 cites·15 claims
- 0751US2018204738A1Chamber for patterning non-volatile metalsLAM RES CORP·Filed 2018·Application pending·0 cites
- 0831US9679751B2Chamber filler kit for plasma etch chamber useful for fast gas switchingMCCHESNEY JON·Filed 2012·Granted Jun 13, 2017·0 cites·11 claims
Join the waitlist — get patent alerts
Get an alert when Theo Panagopoulos files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →