Inventor · disambiguated record
Norman E. Hussey
Also filed as: HUSSEY NORMAN E
5 granted patents·16 citations·filing 2007–2016
73Inventor score
Top patents by PatentIndex Score
5 records- 0190US8853653B1Apparatus and techniques for controlling ion implantation uniformityVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Oct 7, 2014·6 cites·16 claims
- 0283US7663125B2Ion beam current uniformity monitor, ion implanter and related methodVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Feb 16, 2010·8 cites·18 claims
- 0366US9738968B2Apparatus and method for controlling implant processVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Aug 22, 2017·1 cites·18 claims
- 0464US9006692B2Apparatus and techniques for controlling ion implantation uniformityVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Apr 14, 2015·1 cites·14 claims
- 0554US7820987B2Predicting dose repeatability in an ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Oct 26, 2010·0 cites·25 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →