Inventor · disambiguated record
Satoshi Shimmura
Also filed as: SHIMMURA SATOSHI
7 granted patents·3 pending applications·12 citations·filing 2010–2023
74Inventor score
Top patents by PatentIndex Score
10 records- 0195US11273464B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Mar 15, 2022·10 cites·12 claims
- 0273US10379441B2Liquid processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Aug 13, 2019·2 cites·9 claims
- 0369US2024085813A1Solution treatment apparatus and cleaning methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0463US11868057B2Solution treatment apparatus and cleaning methodTOKYO ELECTRON LTD·Filed 2021·Granted Jan 9, 2024·0 cites·19 claims
- 0554US2024012329A1Liquid processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0651US12257611B2Cleaning jig, coating apparatus, and cleaning methodTOKYO ELECTRON LTD·Filed 2021·Granted Mar 25, 2025·0 cites·10 claims
- 0751US2024009697A1Liquid processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0850US11862485B2Nozzle standby device, liquid processing apparatus and operation method of liquid processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Jan 2, 2024·0 cites·15 claims
- 0944US11235350B2Solution treatment apparatus and cleaning method for solution treatment apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Feb 1, 2022·0 cites·9 claims
- 1043US8430967B2Hydrophobicizing apparatus, hydrophobicizing method and storage mediumSHIMMURA SATOSHI·Filed 2010·Granted Apr 30, 2013·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →