Inventor · disambiguated record
Paola Dececco
Also filed as: DECECCO PAOLA
9 granted patents·182 citations·filing 2003–2014
91Inventor score
Top patents by PatentIndex Score
9 records- 0197US7317531B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2003·Granted Jan 8, 2008·83 cites·30 claims
- 0295US7933016B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2009·Granted Apr 26, 2011·15 cites·20 claims
- 0395US7663753B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2007·Granted Feb 16, 2010·19 cites·45 claims
- 0493US7411188B2Method and system for non-destructive distribution profiling of an element in a filmREVERA INC·Filed 2005·Granted Aug 12, 2008·24 cites·13 claims
- 0591US7884321B2Method and system for non-destructive distribution profiling of an element in a filmREVERA INC·Filed 2008·Granted Feb 8, 2011·10 cites·4 claims
- 0690US8269167B2Method and system for non-destructive distribution profiling of an element in a filmDECECCO PAOLA·Filed 2011·Granted Sep 18, 2012·9 cites·8 claims
- 0788US7379183B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2004·Granted May 27, 2008·18 cites·44 claims
- 0882US9201030B2Method and system for non-destructive distribution profiling of an element in a filmDECECCO PAOLA·Filed 2014·Granted Dec 1, 2015·2 cites·4 claims
- 0977US8610059B2Method and system for non-destructive distribution profiling of an element in a filmDECECCO PAOLA·Filed 2012·Granted Dec 17, 2013·2 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →