Inventor · disambiguated record
Piotr Zalicki
Also filed as: ZALICKI PIOTR · ZALICKI PIOTR S
6 granted patents·248 citations·filing 1998–2009
88Inventor score
Top patents by PatentIndex Score
6 records- 0197US7317531B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2003·Granted Jan 8, 2008·83 cites·30 claims
- 0295US7933016B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2009·Granted Apr 26, 2011·15 cites·20 claims
- 0395US7663753B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2007·Granted Feb 16, 2010·19 cites·45 claims
- 0494US7301634B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2004·Granted Nov 27, 2007·35 cites·33 claims
- 0579US6275297B1Method of measuring depths of structures on a semiconductor substrateSC TECHNOLOGY·Filed 1998·Granted Aug 14, 2001·67 cites·40 claims
- 0677US6650426B1Endpoint determination for recess etching to a precise depthSC TECHNOLOGY INC·Filed 2000·Granted Nov 18, 2003·29 cites·63 claims
Join the waitlist — get patent alerts
Get an alert when Piotr Zalicki files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →