Inventor · disambiguated record
Teng-Fang Kuo
Also filed as: KUO TENG-FANG
12 granted patents·1 pending application·200 citations·filing 2003–2024
90Inventor score
Top patents by PatentIndex Score
13 records- 0196US10020218B2Substrate support assembly with deposited surface featuresAPPLIED MATERIALS INC·Filed 2015·Granted Jul 10, 2018·18 cites·19 claims
- 0296US9240315B1CVD oxide surface pre-conditioning by inductively coupled O2 plasmaAPPLIED MATERIALS INC·Filed 2014·Granted Jan 19, 2016·122 cites·20 claims
- 0394US10861693B2Cleaning methodAPPLIED MATERIALS INC·Filed 2016·Granted Dec 8, 2020·14 cites·20 claims
- 0493US10679885B2Substrate support assembly with deposited surface featuresAPPLIED MATERIALS INC·Filed 2018·Granted Jun 9, 2020·7 cites·20 claims
- 0591US11769683B2Chamber component with protective ceramic coating containing yttrium, aluminum and oxygenAPPLIED MATERIALS INC·Filed 2022·Granted Sep 26, 2023·1 cites·20 claims
- 0691US9870921B2Cleaning methodAPPLIED MATERIALS INC·Filed 2016·Granted Jan 16, 2018·6 cites·20 claims
- 0782US10199221B2Cleaning methodAPPLIED MATERIALS INC·Filed 2017·Granted Feb 5, 2019·2 cites·20 claims
- 0881US7226643B2Thermal pyrolysising chemical vapor deposition method for synthesizing nano-carbon materialNAT SCIENCE COUNCIL·Filed 2003·Granted Jun 5, 2007·29 cites·23 claims
- 0976US11087979B2Cleaning methodAPPLIED MATERIALS INC·Filed 2019·Granted Aug 10, 2021·1 cites·20 claims
- 1075US2024404835A1Chambers and coatings for reducing backside damageAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1172US11476146B2Substrate support assembly with deposited surface featuresAPPLIED MATERIALS INC·Filed 2020·Granted Oct 18, 2022·0 cites·20 claims
- 1242US10008388B2Device conformity control by low temperature, low pressure, inductively coupled ammonia-nitrogen trifluoride plasmaAPPLIED MATERIALS INC·Filed 2017·Granted Jun 26, 2018·0 cites·20 claims
- 1342US9805914B2Methods for removing contamination from surfaces in substrate processing systemsAPPLIED MATERIALS INC·Filed 2015·Granted Oct 31, 2017·0 cites·8 claims
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