Inventor · disambiguated record
Jim Zhongyi He
Also filed as: HE JIM ZHONGYI
8 granted patents·2 pending applications·159 citations·filing 2003–2019
85Inventor score
Top patents by PatentIndex Score
10 records- 0195US7064078B2Techniques for the use of amorphous carbon (APF) for various etch and litho integration schemeAPPLIED MATERIALS INC·Filed 2004·Granted Jun 20, 2006·114 cites·23 claims
- 0292US7718081B2Techniques for the use of amorphous carbon (APF) for various etch and litho integration schemesAPPLIED MATERIALS INC·Filed 2006·Granted May 18, 2010·17 cites·20 claims
- 0389US11114326B2Substrate chucking and dechucking methodsAPPLIED MATERIALS INC·Filed 2019·Granted Sep 7, 2021·6 cites·12 claims
- 0488US10654147B2Polishing of electrostatic substrate support geometriesAPPLIED MATERIALS INC·Filed 2018·Granted May 19, 2020·5 cites·17 claims
- 0582US8475625B2Apparatus for etching high aspect ratio featuresPAMARTHY SHARMA·Filed 2006·Granted Jul 2, 2013·15 cites·22 claims
- 0677US11114327B2ESC substrate support with chucking force controlAPPLIED MATERIALS INC·Filed 2018·Granted Sep 7, 2021·2 cites·20 claims
- 0747US9472416B2Methods of surface interface engineeringAPPLIED MATERIALS INC·Filed 2014·Granted Oct 18, 2016·0 cites·16 claims
- 0842US9805914B2Methods for removing contamination from surfaces in substrate processing systemsAPPLIED MATERIALS INC·Filed 2015·Granted Oct 31, 2017·0 cites·8 claims
- 0938US2019080949A1Soft chucking and dechucking for electrostatic chucking substrate supportsAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 1037US2004018742A1Forming bilayer resist patternsAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
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