Inventor · disambiguated record
Senthil Kumar Nattamai Subramanian
Also filed as: NATTAMAI SUBRAMANIAN SENTHIL KUMAR
3 granted patents·2 pending applications·1 citations·filing 2021–2025
50Inventor score
Files withAPPLIED MATERIALS INC5
Top patents by PatentIndex Score
5 records- 0179US2025354262A1Parallel atomic layer deposition of target element interiorsAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 0277US12074010B2Atomic layer deposition part coating chamberAPPLIED MATERIALS INC·Filed 2021·Granted Aug 27, 2024·1 cites·67 claims
- 0374US12404584B2Parallel atomic layer deposition of target element interiorsAPPLIED MATERIALS INC·Filed 2023·Granted Sep 2, 2025·0 cites·14 claims
- 0470US2024420926A1Atomic layer deposition part coating chamberAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0561US12486571B2Atomic layer deposition coating system for inner walls of gas linesAPPLIED MATERIALS INC·Filed 2022·Granted Dec 2, 2025·0 cites·20 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →