Inventor · disambiguated record

Gerd Deppich

Also filed as: DEPPICH GERD

1 granted patent·2 pending applications·4 citations·filing 2001–2005

27Inventor score

Technology areasH01J

Files withUNAXIS DEUTSCHLAND GMBH3

Top patents by PatentIndex Score

3 records

0158US6579424B2Method for the production of substrates, magnetron source and sputter-coating chamberUNAXIS DEUTSCHLAND GMBH·Filed 2001·Granted Jun 17, 2003·4 cites·11 claims
0247US2005217992A1Magnetron sputtering source and chamber thereforUNAXIS DEUTSCHLAND GMBH·Filed 2005·Application pending·0 cites
0338US2003201174A1Magnetron sputtering source and chamber thereforUNAXIS DEUTSCHLAND GMBH·Filed 2003·Application pending·0 cites

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