Inventor · disambiguated record
Akihiro Sonoda
Also filed as: SONODA AKIHIRO
6 granted patents·50 citations·filing 1986–2011
81Inventor score
Top patents by PatentIndex Score
6 records- 0175US7960078B2Exposure condition setting method, substrate processing device, and computer programTOKYO ELECTRON LTD·Filed 2005·Granted Jun 14, 2011·6 cites·10 claims
- 0269US4738085ARotary cutter for mowersSTARTING IND·Filed 1986·Granted Apr 19, 1988·27 cites·5 claims
- 0365US6432727B1Method for eliminating a static electricity on a semiconductor waferOKI ELECTRIC IND CO LTD·Filed 2000·Granted Aug 13, 2002·10 cites·5 claims
- 0461US8500950B2Exposure condition setting method, substrate processing apparatus, and computer programSAWAI KAZUO·Filed 2011·Granted Aug 6, 2013·2 cites·11 claims
- 0547US6909587B2Apparatus having a static eliminator for manufacturing semiconductor devices and a method for eliminating a static electricity on a semiconductor waferOKI ELECTRIC IND CO LTD·Filed 2002·Granted Jun 21, 2005·2 cites·7 claims
- 0631US6440614B1Mask and method of manufacturing semiconductor deviceOKI ELECTRIC IND CO LTD·Filed 1999·Granted Aug 27, 2002·3 cites·23 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →