Inventor · disambiguated record
Kazuo Sawai
Also filed as: SAWAI KAZUO
4 granted patents·1 pending application·15 citations·filing 2005–2016
71Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0175US8007968B2Substrate processing method, program, computer-readable storage medium and substrate processing systemTOKYO ELECTRON LTD·Filed 2007·Granted Aug 30, 2011·5 cites·18 claims
- 0275US7960078B2Exposure condition setting method, substrate processing device, and computer programTOKYO ELECTRON LTD·Filed 2005·Granted Jun 14, 2011·6 cites·10 claims
- 0368US9396911B2Determination method, control method, determination apparatus, pattern forming system and programTANAKA KEISUKE·Filed 2012·Granted Jul 19, 2016·2 cites·6 claims
- 0461US8500950B2Exposure condition setting method, substrate processing apparatus, and computer programSAWAI KAZUO·Filed 2011·Granted Aug 6, 2013·2 cites·11 claims
- 0545US2016300698A1Pattern forming system and substrate processing systemTOKYO ELECTRON LTD·Filed 2016·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →