Inventor · disambiguated record
Yao-Yuan Shang
Also filed as: SHANG YAO-YUAN
9 granted patents·2 pending applications·8 citations·filing 2014–2024
80Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD11
Top patents by PatentIndex Score
11 records- 0183US11742227B2Wafer cleaning system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Aug 29, 2023·2 cites·20 claims
- 0283US10345716B2Metrology method in reticle transportationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jul 9, 2019·2 cites·20 claims
- 0382US9919350B2Cup-wash device, semiconductor apparatus, and cup cleaning methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Mar 20, 2018·3 cites·18 claims
- 0481US12087602B2Wafer cleaning methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Sep 10, 2024·0 cites·20 claims
- 0581US2024371667A1Wafer cleaning systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0667US10515833B2Wafer cleaning system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Dec 24, 2019·1 cites·19 claims
- 0762US11387123B2Metrology method in wafer transportationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jul 12, 2022·0 cites·20 claims
- 0859US2025349581A1Semiconductor processing apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0953US10651066B2Metrology method in wafer transportationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted May 12, 2020·0 cites·20 claims
- 1051US9770092B2Brush, back surface treatment assembly and method for cleaning substrateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Sep 26, 2017·0 cites·20 claims
- 1131US9570334B2Method and system for positioning wafer in semiconductor manufacturing fabricationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Feb 14, 2017·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →