Inventor · disambiguated record
Volker Boegli
Also filed as: BOEGLI VOLKER
3 granted patents·106 citations·filing 1999–2002
73Inventor score
Top patents by PatentIndex Score
3 records- 0176US6259106B1Apparatus and method for controlling a beam shapeETEC SYSTEMS INC·Filed 1999·Granted Jul 10, 2001·40 cites·10 claims
- 0273US6556702B1Method and apparatus that determines charged particle beam shape codesAPPLIED MATERIALS INC·Filed 1999·Granted Apr 29, 2003·64 cites·16 claims
- 0347US6828570B2Technique for writing with a raster scanned beamAPPLIED MATERIALS INC·Filed 2002·Granted Dec 7, 2004·2 cites·20 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →