Inventor · disambiguated record
Tomohide Minami
Also filed as: MINAMI TOMOHIDE
27 granted patents·4 pending applications·269 citations·filing 2000–2021
96Inventor score
Top patents by PatentIndex Score
31 records- 0196US9903739B2Sensor chip for electrostatic capacitance measurement and measuring device having the sameTOKYO ELECTRON LTD·Filed 2016·Granted Feb 27, 2018·9 cites·10 claims
- 0293US6371667B1Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Apr 16, 2002·76 cites·6 claims
- 0392US9841395B2System of inspecting focus ring and method of inspecting focus ringTOKYO ELECTRON LTD·Filed 2016·Granted Dec 12, 2017·8 cites·11 claims
- 0490US7994793B2Jig for detecting positionTOKYO ELECTRON LTD·Filed 2008·Granted Aug 9, 2011·18 cites·11 claims
- 0588US7024798B2Low-pressure dryer and low-pressure drying methodTOKYO ELECTRON LTD·Filed 2005·Granted Apr 11, 2006·10 cites·4 claims
- 0687US9970838B2Pressure measuring device and pressure measuring methodTOKYO ELECTRON LTD·Filed 2015·Granted May 15, 2018·5 cites·6 claims
- 0787US8149005B2Jig for detecting positionMATSUMOTO TOSHIYUKI·Filed 2008·Granted Apr 3, 2012·13 cites·13 claims
- 0887US6796054B2Low-pressure dryer and low-pressure drying methodTOKYO ELECTRON LTD·Filed 2003·Granted Sep 28, 2004·30 cites·15 claims
- 0984US6238109B1Processing solution supply apparatusTOKYO ELECTRON LTD·Filed 2000·Granted May 29, 2001·34 cites·17 claims
- 1081US11841278B2Temperature measurement sensor, temperature measurement system, and temperature measurement methodTOKYO ELECTRON LTD·Filed 2019·Granted Dec 12, 2023·2 cites·10 claims
- 1178US10837991B2Electrostatic capacitance measuring deviceTOKYO ELECTRON LTD·Filed 2018·Granted Nov 17, 2020·2 cites·14 claims
- 1275US10074549B2Method for acquiring data indicating electrostatic capacitanceTOKYO ELECTRON LTD·Filed 2017·Granted Sep 11, 2018·2 cites·5 claims
- 1375US7510611B2Coating film forming method and apparatusTOKYO ELECTRON LTD·Filed 2005·Granted Mar 31, 2009·4 cites·14 claims
- 1475US6884294B2Coating film forming method and apparatusTOKYO ELECTRON LTD·Filed 2002·Granted Apr 26, 2005·16 cites·9 claims
- 1575US6776845B2Coating film forming method and systemTOKYO ELECTRON LTD·Filed 2002·Granted Aug 17, 2004·16 cites·3 claims
- 1674US7977609B2Temperature measuring device using oscillating frequency signalsTOKYO ELECTRON LTD·Filed 2006·Granted Jul 12, 2011·4 cites·8 claims
- 1773US10018484B2Sensor chip for electrostatic capacitance measurement and measuring device having the sameTOKYO ELECTRON LTD·Filed 2018·Granted Jul 10, 2018·1 cites·10 claims
- 1869US6986214B2Low-pressure dryer and low-pressure drying methodTOKYO ELECTRON LTD·Filed 2004·Granted Jan 17, 2006·9 cites·5 claims
- 1963US7923665B2Temperature measuring device and method for measuring wafer-type thermometersTOKYO ELECTRON LTD·Filed 2006·Granted Apr 12, 2011·4 cites·9 claims
- 2060US7488505B2Coating film forming method and systemTOKYO ELECTRON LTD·Filed 2004·Granted Feb 10, 2009·6 cites·16 claims
- 2158US2021343560A1Apparatus and method for real-time sensing of properties in industrial manufacturing equipmentTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 2254US11460355B2Antenna device and temperature detection methodTOKYO ELECTRON LTD·Filed 2020·Granted Oct 4, 2022·0 cites·12 claims
- 2350US11114321B2Apparatus and method for real-time sensing of properties in industrial manufacturing equipmentTOKYO ELECTRON LTD·Filed 2018·Granted Sep 7, 2021·0 cites·21 claims
- 2450US9709453B2Pressure sensor and method for manufacturing the sameTOKYO ELECTRON LTD·Filed 2015·Granted Jul 18, 2017·0 cites·6 claims
- 2550US8749257B2Position detecting method for performing position alignment of transfer point of transfer armMATSUMOTO TOSHIYUKI·Filed 2012·Granted Jun 10, 2014·0 cites·19 claims
- 2647US9702038B2Pressure sensor and method for manufacturing the sameTOKYO ELECTRON LTD·Filed 2015·Granted Jul 11, 2017·0 cites·9 claims
- 2743US10837810B2Method for calibrating measuring device and case used in the calibration methodTOKYO ELECTRON LTD·Filed 2018·Granted Nov 17, 2020·0 cites·9 claims
- 2843US2009085031A1Wafer-Shaped Measuring Apparatus and Method for Manufacturing the SameTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 2941US10634479B2Measuring instrument for measuring electrostatic capacity and method of calibrating transfer position data in processing system by using measuring instrumentTOKYO ELECTRON LTD·Filed 2017·Granted Apr 28, 2020·0 cites·12 claims
- 3036US2001033895A1Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2001·Application pending·0 cites
- 3136US2004261701A1Coating apparatus and coating methodFiled 2002·Application pending·0 cites
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